Axcelis Technologies Inc.

9

10

158.00

Date Time Volume Order Volume Price
01/07/2026 21:28:35.482 7   158.00
      7 158.00
      7 158.00
01/07/2026 21:02:44.998 17   155.60
      17 155.60
      17 155.60
01/07/2026 20:18:01.522 11   155.60
      11 155.60
      11 155.60
01/07/2026 15:47:00.879 1   154.15
      1 154.15
      1 154.15
01/07/2026 15:37:18.646 1   155.55
      1 155.55
      1 155.55
01/07/2026 15:35:03.438 3   154.40
      3 154.40
      3 154.40
01/07/2026 15:32:41.185 6   157.90
      6 157.90
      6 157.90
01/07/2026 09:30:25.046 2   167.10
      2 167.10
      2 167.10
01/07/2026 09:30:14.553 1   167.10
      1 167.10
      1 167.10
01/07/2026 07:33:52.261 37   163.50
      37 163.50
      37 163.50
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